MEMS chip refers to the microelectromechanical system chip, which is a miniaturized integrated circuit chip that integrates micro-mechanical, electronic, optical and wireless communication technologies. MEMS chips can be used to make a variety of sensors, actuators (BTS724G), micro-electro-mechanical systems (MEMS), and other micro-devices. Due to its advantages of compact size, high precision, low power consumption and high reliability, MEMS chips have been widely used in the field of sensors, becoming one of the brightest stars in this field.
Ⅰ, the application field of MEMS chips
The application areas of MEMS chips are very broad, including the following aspects:
1. Automotive field
MEMS sensors are widely used in the automotive field, such as automotive airbags, braking systems, steering systems, stability systems, engine management systems, etc. At the same time, MEMS chips can also be used for wireless charging, automatic parking, remote monitoring and so on.
2. Medical field
MEMS chips have a wide range of applications in the medical field, such as human body monitoring, blood sugar monitoring, heart rate monitoring, respiratory monitoring and so on. In addition, MEMS chips can also be used for biological detection, disease diagnosis, drug research and development.
3. Industrial field
MEMS chips are widely used in industrial fields, such as robotics, automated production lines, intelligent warehousing, intelligent logistics and so on. At the same time, MEMS chips can also be used for environmental monitoring, industrial safety, energy management and so on.
4. Consumer electronics
MEMS chips are widely used in the field of consumer electronics, such as smart phones, tablets, smart watches, smart homes, etc. At the same time, MEMS chips can also be used for game control, virtual reality, smart speakers and so on.
5. Aerospace field
MEMS chips are widely used in aerospace fields, such as aircraft navigation, high-precision attitude control, satellite navigation, and space station maintenance. At the same time, MEMS chips can also be used for rocket launch, satellite monitoring and so on.
Ⅱ, MEMS chip manufacturing process
The manufacturing process of MEMS chips is very complex and generally includes the following steps:
1, wafer preparation: The manufacturing of MEMS chips is carried out on silicon wafers, and wafer preparation is the first step in the entire manufacturing process. Wafer preparation requires multiple process steps such as lithography, etching, and cleaning to obtain high-quality silicon wafers.
2, structural layer preparation: The structural layer is the main part of the MEMS chip, and its preparation requires multiple lithography, polishing, etching and other process steps. In this process, the shape and size of the structural layer are determined.
3, surface processing: Surface processing refers to the chemical treatment, metal deposition, film and other process steps on the surface of the MEMS chip to improve the electrical properties, mechanical properties and environmental stability of the chip.
4, packaging and testing: MEMS chip packaging and testing is the last step in the manufacturing process, it includes the chip packaging, testing and quality control process steps to ensure that the performance of the chip meets the requirements.
Ⅲ, the market status of MEMS chips
MEMS chips are a rapidly growing industry, and the market size is constantly expanding. According to data from market research firm Yole Developpement, the global MEMS chip market was $12.12 billion in 2019 and is expected to grow to $21.55 billion by 2025.
At present, the main application areas of the MEMS chip market are the automotive, consumer electronics and medical fields, of which the automotive field is the largest market. With the continuous emergence of emerging technologies, the application fields of MEMS chips will be more and more extensive, and the market scale will continue to expand.
Ⅳ, the development trend of MEMS chips
1. Multi-functional
With the development of sensor networks and the Internet of Things, MEMS chips are no longer just a single sensor or actuator, but have multiple functions. For example, MEMS chips can simultaneously implement the functions of multiple sensors such as accelerometers, gyroscopes, and magnetometers to meet the needs of different application fields.
2. Miniaturization
The miniaturization of MEMS chips is one of its development trends. As the chip size gets smaller, the power consumption of MEMS chips will also be reduced, while higher integration and higher performance can be achieved.
3, low power consumption
The power consumption of MEMS chip is one of the key points of its development. With the development of the Internet of Things and sensor networks, MEMS chips need to have the characteristics of low power consumption, long life and high reliability.
4. Intelligence
With the development of artificial intelligence technology, MEMS chips are becoming more and more intelligent. For example, MEMS chips can realize functions such as adaptive control, intelligent analysis and autonomous decision-making to meet the needs of different application fields.
V. Summary
MEMS chip is a bright star in the field of sensors, its application field is wide, the manufacturing process is complex, and the market scale is also expanding. With the continuous emergence of emerging technologies, the application fields of MEMS chips will be more and more extensive, and the market scale will continue to expand. At the same time, the development trend of MEMS chips also shows the characteristics of multi-function, miniaturization, low power consumption and intelligence
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