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Infineon introduces integrated advanced ultrasonic sensors based on MEMS to enable new industrial and medical use cases

Feb 11 2025 2025-02 Sensors Infineon Technologies
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Infineon Technologies AG has made significant progress in the development of capacitive micromechanical ultrasonic sensor (CMUT) technology. With this technology, the company introduced the first highly integrated single-chip solution based on micro-electro-mechanical system (MEMS) ultrasonic sensors with a smaller board area and more powerful performance and functionality, which can be widely used to develop new ultrasonic applications and improve existing applications in consumer electronics, the automotive industry and medical technology.

Infineon Technologies AG has made significant progress in the development of capacitive micromechanical ultrasonic sensor (CMUT) technology. With this technology, the company introduced the first highly integrated single-chip solution based on micro-electro-mechanical system (MEMS) ultrasonic sensors with a smaller board area and more powerful performance and functionality, which can be widely used to develop new ultrasonic applications and improve existing applications in consumer electronics, the automotive industry and medical technology.

 

Emanuele Bodini, Senior Director of Infineon Technologies, said: "Infineon's ultrasonic technology enables a very high signal-to-noise ratio and integration, so we believe that this device represents a breakthrough for the industry. We hope to use this technology to develop a product platform that serves a variety of application scenarios in different industries."

 

Unlike traditional piezoelectric body materials, which rely on the deformation of the material itself, CMUT transmits and detects ultrasonic waves by deflection of a micromachined semiconductor diaphragm. This principle, combined with its small size, low power consumption and high performance, enables the device to enhance a variety of ultrasonic applications. Compared to single-tube solutions, Infineon's MEMS and ASIC integration technology reduces background noise to one-twentieth that of conventional piezoelectric ceramic materials of the same size and enhances the absolute signal by a factor of a thousand. With expertise in semiconductor design and manufacturing, Infineon applies advanced technologies to a wide range of industries, from consumer electronics to medical devices.

 

Improved solid state touch buttons

Infineon's CMUT technology enables solid-state touch buttons in any solid material, such as glass or even metal, without deforming the surface. This provides a more durable and reliable alternative to traditional mechanical buttons, reducing the risk of wear and extending the overall service life of the device. In contrast to capacitive touch buttons, which can be affected by environmental factors such as humidity and temperature, CMUT-based touch buttons are fully compatible with water and have high electromagnetic compatibility (EMC). Because the technology reduces the size of buttons, it can be integrated with devices ranging from smartphones to industrial control panels, such as the ability to install touch buttons under the metal frame of a phone or replace car doorknobs for a neat design.

 

Level sensing

Infineon's CMUT can benefit some household appliances that require level sensing. The CMUT offers several advantages, including continuous measurement of fill levels, low power consumption, and easy, non-destructive installation under the bottom of the tank. Since contact electrodes can corrode, this last point is important for measuring chemicals in washing machines or dishwashers, for example.

 

Advanced medical applications

CMUT technology can also be used to develop innovative medical devices using ultrasound technology, such as wearable devices for vital sign monitoring, health tracking and non-invasive medical diagnostics. With CMUT technology, these devices can provide continuous monitoring and feedback rather than single measurements, thus identifying potential health problems earlier and improving patient outcomes. Due to their small size and low power consumption, they are ideal for wearables and point-of-care applications.

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